SunRising - White Light Interferometry (WLI) Inspection Report for SiC / Si₃N₄ Materials

A5-3-3-1

The White Light Interferometer (WLI) is a high-precision optical measurement technology capable of detecting the microscopic surface morphology of materials with nanometer-scale resolution.

When inspecting the mirror-polished surfaces of high-density ceramic components, WLI can accurately capture surface micro-defects such as pits, scratches, or voids.


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Pre-Polishing Surface Image – SunRising SiC / Si₃N₄

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Surface Image After Polishing and Grinding


Surface Output from White Light Interferometry (WLI)

When measuring the mirror-polished surfaces of high-density ceramic components, the White Light Interferometer (WLI) can accurately detect surface micro-defects, such as pits, scratches, or voids。
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Figure 1. White Light Interferometry (WLI) Scan – SunRising SiC / Si₃N₄ Surface

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Figure 2. White Light Interferometry (WLI) Scan – SunRising SiC / Si₃N₄ Surface



The Si₃N₄ / SiC material from SunRising was precision-polished to a mirror-like finish and analyzed using a White Light Interferometer (WLI). The results showed that the surface was continuous and smooth, with no detectable pores or microcracks.

Given that the WLI offers a vertical resolution of up to 1 nm and a lateral resolution of up to 300 nm, any internal porosity connected to the surface would appear as height variations in the interferometric scan.

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White Light Interferometry (WLI) Scan of SunRising SiC / Si₃N₄ Surface


However, no abnormalities were observed during this test, indicating that the Si₃N₄ / SiC component has a very low porosity, a dense microstructure, and excellent manufacturing quality.

Through the non-destructive inspection capabilities of the White Light Interferometer (WLI), we are able to quantitatively evaluate the uniformity and integrity of the ceramic surface, providing a scientific basis for quality control and process optimization. The results confirm that this Si₃N₄ / SiC sample meets high-density standards and is well-suited as a key material for high-performance applications.

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Figure. White Light Interferometry (WLI) Scan – SunRising SiC / Si₃N₄ Surface